KLA-TENCOR Industrial Partner

M-Gage 300 - KLA/Tencor M-Gage 300 Non-Contact Wafer Thickness Measurement Simple Type: Measurement...

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Part Number:
M-Gage 300
Model Number:
M-Gage 300
Make:
KLA / TENCOR
Lead Time:
Available
Qty In Stock:
Available

KLA/Tencor M-Gage 300 Non-Contact Wafer Thickness Measurement Simple Type: Measurement System

For Resellers and High Volume Orders:
Please request a quote to obtain preferred pricing.

Features

  • 115V, 60 Hz.
  • Capacitance Head Non-Contact Measurement
  • Measurement Range: 1 mOhm/Sq to 1,999 mOhm/Sq and 1 Ohm/Sq to 1,999 Ohm/Sq
  • Model Number 50-03000
  • Non-contact wafer monitor for sheet resistance
  • Switchable Between Manual & Automatic Mode
  • Wafer Carriage Accommodates 2”-6” Wafers

Specifications

    General
  • Capable of Measuring: Up to 150mm Wafers
  • Measurement Range: 1m ohm/square to 2,000 m ohm/square
  • Sheet Resistance Testing: YES
  • Wafer Size Range Maximum: 150 mm

 

Applications

  • None Available

Aliases

  • None Available